SEMICONDUCTOR DEVICE AND PRODUCTION PROCESS THEREOF

PURPOSE:To obtain a production process of a semiconductor device having a fine structure wherein the connection between interconnection layers can be perfectly made even when the insulation layer is thick and the aspect ratio of the contact hole or via-hole is high. CONSTITUTION:Unlike the conventio...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	ARIMA YUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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