SCANNING ELECTRON MICROSCOPE

PURPOSE:To make no need of scanning a plurality of scanning regions reciprocally and provide a screen with high quality within a short time by displaying a fixed image without continuously scanning scanning regions of an image magnified at low magnification to select the magnification position. CONS...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAGEYAMA KASHIO, GUNJI KAZUHIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To make no need of scanning a plurality of scanning regions reciprocally and provide a screen with high quality within a short time by displaying a fixed image without continuously scanning scanning regions of an image magnified at low magnification to select the magnification position. CONSTITUTION:An image magnified at low magnification to select the magnification position is once saved in an image memory 26 and memorized and a fixed image retaining the image data and displayed and a marker displaying signal generated in a marker displaying circuit 28 to display a rectangular frame are added by an adder 31. The result is sent out to a display monitor 29 and a frame with an optional size is overlaid on the image and displayed. Since an image magnified at high magnification to be observed is displayed by magnifying the sample image surrounded by the frame, the size and the position shown above the image to select the magnification position are converted into the size and the position in a scanning region of a sample by a microcomputer 12. Consequently, the magnification can be controlled by changing the degree of the current to be applied to a deflecting coil 5 and the image signal is taken in an image memory 27 and sent out to and displayed on a display monitor 30.