MASK ALIGNER

PURPOSE:To cope with the alignment from a microscopic interval to a wide interval. CONSTITUTION:Two mirrors 6, having a total reflection function, are provided on the inclined surfaces of a pair of parallelograms formed in V-shape by closely adhering their inner sides on the lower surface with each...

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1. Verfasser: TAJIMA IWAO
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To cope with the alignment from a microscopic interval to a wide interval. CONSTITUTION:Two mirrors 6, having a total reflection function, are provided on the inclined surfaces of a pair of parallelograms formed in V-shape by closely adhering their inner sides on the lower surface with each other.