STAGE DEVICE AND EXPOSURE DEVICE

PURPOSE:To provide a stage device provided with an attraction device having sufficiently large attracting force. CONSTITUTION:A stage device is provided with a lower plate 15, an upper plate 17 placed on the lower plate 15 so that it can be freely moved horizontally with respect to the lower plate 1...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NARAKI TAKESHI, MATSUBARA HISATO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLIDMATERIALS OR FLUIDS MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROMSOLID MATERIALS OR FLUIDS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATICTABLES OR JIGS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a stage device provided with an attraction device having sufficiently large attracting force. CONSTITUTION:A stage device is provided with a lower plate 15, an upper plate 17 placed on the lower plate 15 so that it can be freely moved horizontally with respect to the lower plate 15, and a dust collecting means arranged on the upper plate 17 to collect dust generated when the upper plate is moved. Further, the dust collecting means is provided with an attraction member 19 for attracting dust, and an electrically charging means for charging either the attraction member 19 or dust with a positive charge, while charging the other of them with a negative charge for the purpose of attraction.