MIRROR DEVICE AND ITS PRODUCTION

PURPOSE:To provide the electrostatic mirror device which can be miniaturized to the millimeter order and can be integrated and suppresses the deflection angle of reflected light in a wider range than a conventional mirror device. CONSTITUTION:The mirror device is provided with a reflection layer 3 w...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TAKAGI HIROTSUGU
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!