MIRROR DEVICE AND ITS PRODUCTION

PURPOSE:To provide the electrostatic mirror device which can be miniaturized to the millimeter order and can be integrated and suppresses the deflection angle of reflected light in a wider range than a conventional mirror device. CONSTITUTION:The mirror device is provided with a reflection layer 3 w...

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Bibliographische Detailangaben
1. Verfasser:	TAKAGI HIROTSUGU
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To provide the electrostatic mirror device which can be miniaturized to the millimeter order and can be integrated and suppresses the deflection angle of reflected light in a wider range than a conventional mirror device. CONSTITUTION:The mirror device is provided with a reflection layer 3 where a mirror is arranged, a support member which supports the reflection layer, a cantilever 4 which is arranged between an insulating film 6 provided on a substrate 1 and the support member 5 and supports one end of the support member, and an adsorption layer 2 which connects the insulating film provided on the substrate and the other end of the support member.