LEAKAGE STATE INSPECTION DEVICE FOR VESSEL

PURPOSE:To provide a leakage state inspection device far a vessel of a simple structure requiring no extended measurement time, which allows high precision and reliable measurement. CONSTITUTION:An error at manufacture of a sensor part 11 that detects leakage state is stored in a RAM 52 in advance....

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HARADA KAZUO, KISHIDA KATSUMI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE:To provide a leakage state inspection device far a vessel of a simple structure requiring no extended measurement time, which allows high precision and reliable measurement. CONSTITUTION:An error at manufacture of a sensor part 11 that detects leakage state is stored in a RAM 52 in advance. At measurement of leakage state, a CPU 50 detects the pressure in a tank filled with inactive gas based on the detection value of a semiconductor sensor 40, and then the error stored in the RAM 52 is added to that detection value so that real pressure is calculated. The CPU 50 stares the pressure in the tank after compensation periodically. The stored measurement data is analyzed by the CPU 50, and when the pressure change within specified period is less than specified amount, it is judged that no leakage has occurred.