SCANNING ALIGNER AND METHOD THEREFOR

PURPOSE:To correct a transfer image deformed due to the change in the shape of substrate by the expansion or contraction of a photosensitive substrate within the title scanning exposure device for scanning a projection optical system comprising arrayed plural masks and the photosensitive substrate i...

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Bibliographische Detailangaben
Hauptverfasser:	MIYAZAKI SEIJI, NARABE TAKESHI, YANAGIHARA MASAMITSU, SEKI MASAMI, NARAKI TAKESHI, MORI SUSUMU, CHIBA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE:To correct a transfer image deformed due to the change in the shape of substrate by the expansion or contraction of a photosensitive substrate within the title scanning exposure device for scanning a projection optical system comprising arrayed plural masks and the photosensitive substrate in the linear direction. CONSTITUTION:Parallel flat plate glasses 4a-4e are provided in an optical path between plural projection optical systems 3a-3e and a photosensitive substrate 5 arranged in the direction (Y direction) orthogonal to the scanning direction. Next, the projection magnifying power of the projection optical system is changed by a magnification control device 10 according to the expansion and contraction (change in shape) of the photosensitive substrate 5 as well as the parallel flat plate glasses are rotated by a driving device 12 so as to shift the optical axes AX1-AX5 in the X.Y direction.