MANUFACTURE OF FERRITE SUBSTRATE THIN FILM MAGNETIC HEAD

PURPOSE:To form a ferrite substrate thin film magnetic head accurately and with higher mass productivity. CONSTITUTION:After the application of an etching mask, a chemical etching is performed using an aqueous solution of phosphoric acid or the like to form an air bearing part 17. A protective film...

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1. Verfasser: TERADA NOBUHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To form a ferrite substrate thin film magnetic head accurately and with higher mass productivity. CONSTITUTION:After the application of an etching mask, a chemical etching is performed using an aqueous solution of phosphoric acid or the like to form an air bearing part 17. A protective film 13 is left without etching. Then, the height of the protective film 13 other than the air bearing part 17 is made lower than the surface of the air bearing by mechanical working using a grind stone or the like. This makes possible the checking of possible chipping or the like during the sliding of a disc thereby achieving higher reliability of a magnetic disc. The height of the protective film 13 may also be lowered by an etching using the etching mask used in the formation of the air bearing part 17 as mask again.