MULTILAYER FORMED ARTICLE COATED WITH HEAT-DECOMPOSED BORON NITRIDE AND ITS PRODUCTION
PURPOSE:To obtain a coated multilayer article having excellent heat-resistance, corrosion resistance and chemical stability by forming a graphite layer on a surface of a substrate made of boron nitride, smoothing the obtained multilayer article to a smoothness higher than a specific level and formin...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE:To obtain a coated multilayer article having excellent heat-resistance, corrosion resistance and chemical stability by forming a graphite layer on a surface of a substrate made of boron nitride, smoothing the obtained multilayer article to a smoothness higher than a specific level and forming a heat-decomposed boron nitride coating layer on the smoothed surface. CONSTITUTION:This multilayer formed article coated with a heat-decomposed baron nitride is produced by forming a graphite layer on a surface of a boron nitride substrate by CVD process, smoothing the surface of the obtained multilayer article to a maximum peak height of =0.5mm to lessen the concentration of the internal stress and forming a heat-decomposed boron nitride film on the smoothed surface by a CVD apparatus. |
---|