MULTILAYER FORMED ARTICLE COATED WITH HEAT-DECOMPOSED BORON NITRIDE AND ITS PRODUCTION

PURPOSE:To obtain a coated multilayer article having excellent heat-resistance, corrosion resistance and chemical stability by forming a graphite layer on a surface of a substrate made of boron nitride, smoothing the obtained multilayer article to a smoothness higher than a specific level and formin...

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Bibliographische Detailangaben
Hauptverfasser: IWAI RYOJI, KIMURA NOBORU
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To obtain a coated multilayer article having excellent heat-resistance, corrosion resistance and chemical stability by forming a graphite layer on a surface of a substrate made of boron nitride, smoothing the obtained multilayer article to a smoothness higher than a specific level and forming a heat-decomposed boron nitride coating layer on the smoothed surface. CONSTITUTION:This multilayer formed article coated with a heat-decomposed baron nitride is produced by forming a graphite layer on a surface of a boron nitride substrate by CVD process, smoothing the surface of the obtained multilayer article to a maximum peak height of =0.5mm to lessen the concentration of the internal stress and forming a heat-decomposed boron nitride film on the smoothed surface by a CVD apparatus.