DRIVING POWER SENSOR AND MANUFACTURE OF DRIVING POWER SENSOR

PURPOSE: To easily manufacturing an inexpensive power sensor by at least partially forming a deflection element and a vibrator from silicon and placing a dielectric layer between the deflection element and the vibrator. CONSTITUTION: A vibrator 3 of a power sensor 1 is arranged at a deflection eleme...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YURUGEN SHIRUMAA, GERUHARUTO BENTSU, EERIHI TSUAPURAA, FURANTSU RERUMAA, BUERUNAA UURAA, ANDOREA SHIRUPU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!