DRIVING POWER SENSOR AND MANUFACTURE OF DRIVING POWER SENSOR

PURPOSE: To easily manufacturing an inexpensive power sensor by at least partially forming a deflection element and a vibrator from silicon and placing a dielectric layer between the deflection element and the vibrator. CONSTITUTION: A vibrator 3 of a power sensor 1 is arranged at a deflection eleme...

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Bibliographische Detailangaben
Hauptverfasser:	YURUGEN SHIRUMAA, GERUHARUTO BENTSU, EERIHI TSUAPURAA, FURANTSU RERUMAA, BUERUNAA UURAA, ANDOREA SHIRUPU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PURPOSE: To easily manufacturing an inexpensive power sensor by at least partially forming a deflection element and a vibrator from silicon and placing a dielectric layer between the deflection element and the vibrator. CONSTITUTION: A vibrator 3 of a power sensor 1 is arranged at a deflection element 2 that is formed as a diaphragm. A structured dielectric layer 4 is arranged between the vibrator 3 and the deflection element 2. The vibrator 3 and the deflection element 2 are structured by a first silicon layer 9 and a second silicon layer 10, respectively. Especially, the deflection element 2 and the vibrator 3 are formed at least partially by silicon, and the dielectric layer 4 is arranged between the deflection element 2 and the vibrator 3, thus improving a power sensor and easily and inexpensively enabling its manufacture.