LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURE

PURPOSE:To enhance Ti, Al, and glass in adhesion to each other and to protect Al against corrosion by a method wherein a metal film to serve as a gate electrode and another metal film to serve as a source/drain electrode are formed of a laminated film composed of Ti and Al. CONSTITUTION:A first metal laminated film composed of Ti/Al or Ti/Al/Ti to serve as a gate electrode 3 is formed on an insulating transparent substrate such as a glass substrate 1. A resist pattern is formed on the first metal laminated film, and the laminated film is patterned by gas through a dry etching method. Thereafter, the resist pattern is removed by resist-dedicated release agent. At this point, a TAB mounting electrode 3a on a gate side is led out to the end of the extension of a gate wiring and arranged by the same gate material. As mentioned above, the gate electrode 3 is formed of a laminated layer of Ti/Al, whereby Al, can be enhanced in adhesion to glass by a first Ti layer. Glass can be protected against etching when a gate electrode is processed, and a transistor section can be protected against contamination caused by a glass substrate 1.