MICRO ACTUATOR AND SEALING METHOD OF HYDRAULIC FLUID

PURPOSE:To improve the reliability of an actuator and its manufacturing yield by reducing the unevenness of the stokes of the swelling evacuating vibration of a diaphragm. CONSTITUTION:A diaphragm base body 20 having a diaphragm 21 and an operation fluid space 22 opened at its back is immersed in an...

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Bibliographische Detailangaben
Hauptverfasser:	ANDO MITSUHIRO, IRISA KOICHI, NARUSE YOSHIHIRO, IWATA YUJI, MIZUNO TOMOKIMI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING CYLINDERS DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR ENGINEERING ELEMENTS AND UNITS FLUID-PRESSURE ACTUATORS FLUID-PRESSURE ACTUATORS, e.g. SERVO-MOTORS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MACHINES OR ENGINES FOR LIQUIDS MECHANICAL ENGINEERING MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOTOTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISEPROVIDED FOR MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PISTONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS PRODUCING MECHANICAL POWER SEALINGS SPRING, WEIGHT, INERTIA OR LIKE MOTORS SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL THERMAL INSULATION IN GENERAL TRANSPORTING WEAPONS WIND, SPRING WEIGHT AND MISCELLANEOUS MOTORS
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Beschreibung
Zusammenfassung:	PURPOSE:To improve the reliability of an actuator and its manufacturing yield by reducing the unevenness of the stokes of the swelling evacuating vibration of a diaphragm. CONSTITUTION:A diaphragm base body 20 having a diaphragm 21 and an operation fluid space 22 opened at its back is immersed in an operation liquid whose temperature is maintained at a temperature higher than an operation fluid space temperature at the time of the diaphragm 21 being at the lower dead center substantially at the time of micro actuator use, and a support slab 30 on whose surface UV rays curing bonding agent layer is formed, is mounted on the diaphragm base body 20 in the operation liquid, and by irradiating the UV rays, the support slab 30 is fixed at the base body 20.