SEMICONDUCTOR INTEGRATED CIRCUIT APPARATUS AND INSPECTION METHOD THEREOF

PURPOSE:To provide an inspection method which enables the keeping of the results of judgement of an inspection process for judging the quality of a semiconductor integrated circuit accurately. CONSTITUTION:After a test process 12 is implemented in a semiconductor integrated circuit, an inspection process 13 is implemented to judge whether the semiconductor integrated circuit operates normally or not and when acceptance is determined in the results of judgment with the inspection process 13, the semiconductor integrated circuit is kept on the inspector with which the inspection process 13 was implemented and the same apparatus is used to perform a writing for saving the history of the results of judgement into a non-volatile memory element area within the semiconductor integrated circuit. This enables the keeping of the results of judgement accurately without mixing of accepted products with rejected products.