OPENING/CLOSING VALVE FOR ELECTRON BEAM DEVICE
PURPOSE:To reduce the dimension of an electron beam device by surely preventing the generation of charge-up of a sealing member without setting the sealing member sufficiently far from the electron beam in the valve opening. CONSTITUTION:A sealing member 3 consists of a conductor. Further, the seali...
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Zusammenfassung: | PURPOSE:To reduce the dimension of an electron beam device by surely preventing the generation of charge-up of a sealing member without setting the sealing member sufficiently far from the electron beam in the valve opening. CONSTITUTION:A sealing member 3 consists of a conductor. Further, the sealing member 3 is electrically connected to the ground (earth) through a press- attaching member 2 and a driving arm 4. Even if the sealing member 3 is positioned in the vicinity of the passage of the electron beam 5 in the valve opening (state (b)) when the opened port part 1a is opened, the generation of charge-up of the sealing member 3 is prevented, and the necessity of setting the sealing member 3 sufficiently far from the opened port part 1a in the valve opening is obviated. |
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