LAUNCHER FOR HIGH-FREQUENCY HEATING DEVICE
PURPOSE:To prevent damage of waveguide bundle due to electromagnetic force by avoiding large induction current in the waveguide even with the generation of plasma disruption. CONSTITUTION:In the launcher for high-frequency heating device for heating plasma by transmitting high-frequency electromagne...
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Zusammenfassung: | PURPOSE:To prevent damage of waveguide bundle due to electromagnetic force by avoiding large induction current in the waveguide even with the generation of plasma disruption. CONSTITUTION:In the launcher for high-frequency heating device for heating plasma by transmitting high-frequency electromagnetic wave with waveguide bundle dividing the electromagnetic wave into a plurality of parts, a plurality of partition plates 21 are arranged at a proper intervals and between the facing surfaces at the upper and lower parts, insulation spacers 22 formed with electric insulator or coated with insulator are fixed to constitute a waveguide bundle 23. |
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