METHOD AND DEVICE FOR PRODUCING ZINC OXIDE THIN FILM

PURPOSE:To provide a method for forming a zinc oxide thin film, capable of forming the transparent thin film of the ZnO on a substrate having arbitrary size and shape by vacuum-depositing the ZnO sublimed in the high temperature region of a heating tube on the substrate disposed in its low temperatu...

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Bibliographische Detailangaben
Hauptverfasser:	HORIGUCHI YASUNOBU, FUJIZU SATORU, NORITAKE FUMITOMO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a method for forming a zinc oxide thin film, capable of forming the transparent thin film of the ZnO on a substrate having arbitrary size and shape by vacuum-depositing the ZnO sublimed in the high temperature region of a heating tube on the substrate disposed in its low temperature region. CONSTITUTION:A method for producing the thin film of zinc oxide comprises supplying an inert gas containing a reducing gas in a concentration of 0.1-50vol.% into a heat-resistant heating tube 2 through a gas-supplying tube 3, subliming the ZnO received in the heating tube 2 at a high temperature with a circular heating oven 1, and subsequently forming the transparent thin film of the ZnO on the substrate 7 disposed in contact with the tip surface of the hollow of the heating tube 2 and surrounded with a surrounding material 8 whose outer surface comprises a heat-insulating material.