MICROCAPACITOR

PURPOSE: To obtain quite a new capacitor having a large capacitance and a small cubic volume. CONSTITUTION: A porous structure is formed on the substrate of conductive substance (metal-doped semiconductor) or on its specific region, and the inside surface of this structure is covered by a non-conduc...

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Bibliographische Detailangaben
Hauptverfasser: GERUHARUTO BATORAA, GUDORAN BOHEMERU, GERUHARUTO ERUSUNAA, HORUGERU HINKERU, JIERUGEN KENFU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE: To obtain quite a new capacitor having a large capacitance and a small cubic volume. CONSTITUTION: A porous structure is formed on the substrate of conductive substance (metal-doped semiconductor) or on its specific region, and the inside surface of this structure is covered by a non-conductive substance 9. Then, another conductive substance 10 is deposited on the layer 9. As a result, a very large sponge-like porous structure is formed on the inner surface of the substrate, and a capacitor is formed together with a dielectric isolation layer 9 and its conductive layer.