OPTICAL MODULATOR AND METHOD FOR FORMING ELECTRIC CONTACT OF OPTICAL MODULATOR
PURPOSE: To eliminate the need for precise positioning by boring a hole which extends to the surface of an electrode in an insulating layer formed on the surface of the electrode. CONSTITUTION: A 1st-level hole 20 is formed penetrating a 1st-level insulating layer 22 and many holes 20 are formed in...
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Sprache: | eng |
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Zusammenfassung: | PURPOSE: To eliminate the need for precise positioning by boring a hole which extends to the surface of an electrode in an insulating layer formed on the surface of the electrode. CONSTITUTION: A 1st-level hole 20 is formed penetrating a 1st-level insulating layer 22 and many holes 20 are formed in respective electrodes so as to obtain excellent electric contacts. Further, a 2nd-level hole 24 is bored in a 2nd-level insulating layer 26 and this 2nd-level hole 24 is preferably much larger than the 1st-level hole 20, but preferably does not expand onto an adjacent electrode. One 2nd-level hole 24 bored for each electrode surrounds all 1stlevel holes 20 below it. Further, the metal layer 16 of a contact pad is vapor-deposited filling the holes of the insulating layer, a solder projection 18 is formed thereupon, and the contact pad and projection 18 may expand onto an adjacent electrode. |
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