NITROGEN REFLOW APPARATUS

PURPOSE:To provide a nitrogen reflow apparatus, in which outside air can be prevented from infiltration into a heating chamber. CONSTITUTION:A main conveyor 4 is arranged at higher position than an inlet 5 and/or an outlet of the heating chamber 1, and auxiliary conveyors 21 for delivering a substra...

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Bibliographische Detailangaben
1. Verfasser: MURAKAMI SHUSAKU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PURPOSE:To provide a nitrogen reflow apparatus, in which outside air can be prevented from infiltration into a heating chamber. CONSTITUTION:A main conveyor 4 is arranged at higher position than an inlet 5 and/or an outlet of the heating chamber 1, and auxiliary conveyors 21 for delivering a substrate 10 to/from the main conveyor 4 are arranged at an inlet part 1a and an outlet part of both side parts of the main conveyor 4. Further, lifting means ascending/descending the auxiliary conveyors 21 between two positions of the same height of the main conveyor 4 and the same height of a carry-in conveyor 13 and a carry-out conveyor arranged at the inlet 5 and the outlet are arranged. Therefore, by flow of the nitrogen gas discharged from the inlet 5 and the outlet of the heating chamber 1, the outside air can be prevented from the filtration into the heating chamber 1.