MANUFACTURE OF SURFACE EMITTING LASER ON SILICON SUBSTRATE

PURPOSE:To provide a method of manufacturing a high-quality surface-emitting laser on a silicon substrate free from cracking. CONSTITUTION:In a surface emitting laser of a structure, wherein an optical resonator is constituted of first and second light reflection layers 7 and 14 by laminating a buff...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUGO MITSURU, OKAMOTO MINORU, KOHAMA TAKETAKA, OISO YOSHITAKA
Format: Patent
Sprache:eng
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