JPH067589B
PURPOSE:To obtain a novel MSM or MIS type element and manufacture thereof by employing a thin-film consisting of a specific phthalocyanine derivative as a semiconductor layer. CONSTITUTION:A MSM or MIS type element is manufactured in such a manner that a semiconductor layer composed of a phthalocyan...
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Zusammenfassung: | PURPOSE:To obtain a novel MSM or MIS type element and manufacture thereof by employing a thin-film consisting of a specific phthalocyanine derivative as a semiconductor layer. CONSTITUTION:A MSM or MIS type element is manufactured in such a manner that a semiconductor layer composed of a phthalocyanine derivative represented by formula (where R represents a 3-25C normal chain or branching hydrocarbon group and Me magnesium or transition metallic ions, and the position of substitution of -OR group occupies 5 rank or 6 rank in an isoindoline group in formula) is shaped onto a substrate consisting of a conductive material having a large work function and a conductive material layer having a small work function is formed. The semiconductor layer is shaped by shifting a monomolecular film composed of a substance such as the phthalocyanine derivative onto the substrate through a vertical dipping method or a horizontal adhesion method. Indium oxide tin, etc. having sheet resistance of 30OMEGA/sq. or less are used as the conductive material MA having the large work function and lithium, etc. as the conductive materials MS having the small work function, and a metallic salt of a 16-22C normal chain saturated fatty acid is employed as an insulating layer. |
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