WAFER SURFACE INSPECTING DEVICE FOR DUST-FREE CHAMBER

PURPOSE:To improve productivity by shortening an inspecting time even in a dustfree chamber having small floated foreign matter fine particles and small side with high cleanness in a wafer surface inspecting device for a dustfree chamber for inspecting the particles adhered to a surface of the wafer...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	NOMAKI KOJI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!