APPARATUS AND METHOD FOR JUDGMENT OF SHAPE

PURPOSE:To judge the direction of a nearly regular cube-shaped body accurately and quickly. CONSTITUTION:A face Fx faced to the X-direction of a material M is irradiated with a slit-shaped laser beam Lx having a width W from the X-direction, a face Fy faced to the Y-direction is irradiated with a sl...

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Bibliographische Detailangaben
Hauptverfasser: IKEDA AKIRA, OHASHI YUZURU
Format: Patent
Sprache:eng
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Zusammenfassung:PURPOSE:To judge the direction of a nearly regular cube-shaped body accurately and quickly. CONSTITUTION:A face Fx faced to the X-direction of a material M is irradiated with a slit-shaped laser beam Lx having a width W from the X-direction, a face Fy faced to the Y-direction is irradiated with a slit-shaped laser beam Ly having the width W from the Y-direction and the material is scanned in the Z-direction. At this time, the beams Lx and Ly are deflected in such a way that they protrude from one side each of the Fx and the Fy by a prescribed width. Thereby, a width W1 in a shielded part and/or a width W2 in a nonshielded part by the Fx and Fy of the beams Lx and Ly are detected.