CORRECTING CARRIER PLATE FOR POLISHING MACHINE
PURPOSE:To improve polishing speed, by providing a recessed part for storing a polishing liquid, on both the main plate surfaces of a hard plate. CONSTITUTION:A correcting carrier plate 15 is formed of a cast-iron plate, a recessed part 16 is provided on the middle parts of both the main surfaces of...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To improve polishing speed, by providing a recessed part for storing a polishing liquid, on both the main plate surfaces of a hard plate. CONSTITUTION:A correcting carrier plate 15 is formed of a cast-iron plate, a recessed part 16 is provided on the middle parts of both the main surfaces of the plate 15, and furthermore narrow grooves 17 are provided crosswisely. The diameter and thickness of the recessed part 16 is made about half of the same of the plate 15 respectively, and the narrow grooves 17 are set to width and depth according to the abrasive grain of a polishing liquid. The polishing liquid 8, flowed from the injection hole 11 of the upper surface plate 1, is flowed into the lower surface plate 2 from a gap with a correction carrier plate 15 to be reserved in the middle recessed part 16. The rotational and revolutional motion of the correction carrier 15 at the time of operation causes the polishing liquid 8, stored in the recessed part 16, to be flowed, and to be moved via the narrow grooves 17. Consequently, the polishing liquid 8 between the upper surface plate 1 and the correction carrier 15 is increased to improve polishing speed. |
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