MAGNETIC RECORDING MEDIUM AND ITS PRODUCTION
PURPOSE:To effectively inhibit the scattering and depletion of a lubricant layer by forming a carbon protective film contg. hydrogen and nitrogen on a magnetic film and forming the lubricant layer of a lubricant having one or more polar groups on the protective film. CONSTITUTION:An Ni-P underlayer...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To effectively inhibit the scattering and depletion of a lubricant layer by forming a carbon protective film contg. hydrogen and nitrogen on a magnetic film and forming the lubricant layer of a lubricant having one or more polar groups on the protective film. CONSTITUTION:An Ni-P underlayer 2 is formed on an Al substrate 1 by plating and a Cr underlayer 3 and a magnetic film 4 of a Co-Cr-Ta alloy are further formed by sputtering. A carbon protective film 5 contg. hydrogen and nitrogen is then formed on the magnetic film 4. During this formation, gaseous ammonia as a reactive gas is added to gaseous Ar by 25% of the flow rate of the gaseous Ar by 25% of the flow rate of the gaseous Ar so that the protective film 5 has 45% hydrogen content and 15% nitrogen content. A lubricant layer 6 is formed on the protective film 5. |
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