INSPECTION INSTRUMENT AND DEFECT CORRECTING DEVICE FOR WITH DISPLAY EQUIPMENT

PURPOSE:To facilitate the work until a defective part is positioned in the visual field of a microscopic system for laser irradiation and to efficiently reduce the cost due to the improvement of yield. CONSTITUTION:A defect correcting device enlarge and observe the defective part of a panel 2 and co...

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Bibliographische Detailangaben
Hauptverfasser:	NAKAKURA YUKIHIKO, OSAKI MORIHIDE
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	PURPOSE:To facilitate the work until a defective part is positioned in the visual field of a microscopic system for laser irradiation and to efficiently reduce the cost due to the improvement of yield. CONSTITUTION:A defect correcting device enlarge and observe the defective part of a panel 2 and correct the defective part in order to improve the yield. A defect observing/correcting part 8 is provided with a microscopic system 13 for laser irradiation provided with an objective lens of 50 magnifications and a CCD camera 16 for driving use having a low magnification, a wide visual field and the visual field of the objective lens of 50 magnification of the microscopic system 13 for laser irradiation at the prescribed portion of the visual field oppositely with an interposed panel 2. A transmission illuminator 15 irradiating the panel 2 with a light beam required for detecting a defective part for lighting is arranged.