STICKING TYPE PIEZOELECTRIC VIBRATOR AND ITS PRODUCTION
PURPOSE:To provide a production method of a microminiature piezoelectric vibrator which excels in the machining performance. CONSTITUTION:A comparatively thick auxiliary piezoelectric plate 10 with the plural number of opening parts 11A, 11B, 11C and 11D bored is stuck on a piezoelectric vibrating p...
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Zusammenfassung: | PURPOSE:To provide a production method of a microminiature piezoelectric vibrator which excels in the machining performance. CONSTITUTION:A comparatively thick auxiliary piezoelectric plate 10 with the plural number of opening parts 11A, 11B, 11C and 11D bored is stuck on a piezoelectric vibrating plate 20 which is thinner than the plate 10 with crystal axes of both plates flushed with each other. Then both plates 10 and 20 stuck together are ground by a two-sided abrasive material so that the prescribed total thickness is secured. Then the parts 11A-11D are separated at every opening part and are formed in a prescribed shape. Finally the electrodes 40 and 40 are formed. |
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