DETERMINATION OF CHARACTERISTIC VALUE OF TRANSPARENT LAYER USING POLARIZATION ANALYSIS METHOD

PURPOSE: To determinate the spectral dependency of the characteristic value on the basis of the characteristic value of a transparent film obtained on the discontinuous polarization analysis wavelength, as the initial value. CONSTITUTION: A set of polarization analysis angles Psi and Delta, are measured to the polarization analysis wavelength in one incidence angle of a light beam onto a sample, to obtain the characteristic value of a transparent film to be measured, to one polarization analysis cycle. Then the reflection of the sample depending on the wavelength is measured by a photometer within an extent of the related wavelength, thereby the spectral dependency of the characteristic value is determined with the help of one characteristic value of the transparent film obtained on the discontinuous polarization analysis wavelength as the initial value on the basis of the known relationship.