THIN FILM FORMER EQUIPPED WITH SQUEEGEE

PURPOSE:To form a thin film of a uniform optional film thickness highly precisely by preventing abrasion powder from being generated by removing frictions by a method wherein a table is moved in a direction normal to a squeegee, and a distance between the horizontal surface and a tip part is kept at...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: INO SHIGEHARU, KAJITANI SEIICHI, KUMAGAI FUYUTO, HORII TERUO, NISHIOKA TADASHI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PURPOSE:To form a thin film of a uniform optional film thickness highly precisely by preventing abrasion powder from being generated by removing frictions by a method wherein a table is moved in a direction normal to a squeegee, and a distance between the horizontal surface and a tip part is kept at a specific value. CONSTITUTION:A film former 1 forms a thin film 22 having a specific film thickness on a horizontal surface 2a by scraping off an excess content 20 of viscous liquid 20 having a specific viscosity applied onto a table 2 having a horizontal surface 2a. In that case, the table 2 is moved horizontally in a direction normal to a tip part 4a of the squeegee 4 with a transfer means 3. Further, a distance between the horizontal surface 2a and the tip 4a of the squeegee 4 is kept at a specific value with a keeping means 7. Furthermore, the specific distance with the keeping means 7 is adjusted optionally with a regulation means 8. Thereby, friction between the tip 4a of the squeegee 4 and the horizontal surface 2a of the table 2 is removed to prevent abrasion powder from being generated, and a uniform optional thickness thin film is formed highly precisely.