APPARATUS AND METHOD FOR PRODUCING CERAMICS LAMINATE
PURPOSE:To obtain a ceramics laminate free from delamination or damage by a method wherein green sheets are superposed one upon another to be arranged between the elastic members provided to both of the bottom surface of the depressed part formed to a substrate and an upper opening part in a liquid-...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To obtain a ceramics laminate free from delamination or damage by a method wherein green sheets are superposed one upon another to be arranged between the elastic members provided to both of the bottom surface of the depressed part formed to a substrate and an upper opening part in a liquid-tight manner and subjected to pressure molding by a pressure fluid through the elastic members and, thereafter, the pressure fluid is introduced under pressure from the bottom surface of the depressed part to extrude a laminate. CONSTITUTION:A plurality of green sheets are arranged on the rubber elastic member 4 arranged on the bottom surface of the depressed part of a substrate 3 in a liquid-tight manner and an upper opening part is covered with a lid member 6 through a rubber elastic member 5 to be fixed by a fixing member. Next, the depressed part 3b is evacuated and a pressure fluid is introduced into the space between the elastic member 4 and the bottom part of the depressed part 3b and the space between the elastic member 5 and the lid member 6 from pressure fluid introducing and discharging passages 3i, 6c to integrate the green sheets. Subsequently, the depressed part 3b is returned to normal pressure to detach the lid member 6 and the elastic member 5. The pressure fluid is again introduced into the space between the elastic member 4 and the bottom surface of the depressed part 3b to extrude a ceramic laminate. |
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