DISPLAY SUBSTRATE AND ITS PRODUCTION

PURPOSE:To provide the display substrate having a multilayered thin film structure with decreased coverage defects and the process for simple production of such substrate. CONSTITUTION:A gate flattening film 5 of the thickness approximately equal to the thickness of gate electrodes 3 formed of a lig...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HIROBE TOSHIHIKO, MATSUMOTO HITOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PURPOSE:To provide the display substrate having a multilayered thin film structure with decreased coverage defects and the process for simple production of such substrate. CONSTITUTION:A gate flattening film 5 of the thickness approximately equal to the thickness of gate electrodes 3 formed of a light shieldable material on the substrate 1 is formed over the entire part on the surface of the substrate 1 where the gate electrodes 3 are not formed and over entire level difference edge part of the gate electrodes 3. This gate flattening film 5 is formed by using the gate electrodes 3 as a light shielding mask and irradiating the substrate with exciting light 30 from the surface on the side opposite to the gate electrode 3 forming side of the substrate 3 while passing a photoexcitable gaseous material to the gate electrode 3 forming side of the substrate 1 and, therefore, there is no need for the mask to be exclusively used for forming the gate flattening film 5.