MEASURING METHOD OF ORGANIC MATTER ADSORBED ON SEMICONDUCTOR SUBSTRATE SURFACE

PURPOSE:To measure trace amount of organic matter adsorbed on the surface of a semiconductor substrate with high sensitivity. CONSTITUTION:Reaction liquid 105 including metal compound reacting with organic matter on the surface of a semiconductor substrate 103 is brought into contact with the semico...

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Bibliographische Detailangaben
1. Verfasser:	TAMAOKI MAKIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE:To measure trace amount of organic matter adsorbed on the surface of a semiconductor substrate with high sensitivity. CONSTITUTION:Reaction liquid 105 including metal compound reacting with organic matter on the surface of a semiconductor substrate 103 is brought into contact with the semiconductor substrate 103, the organic matter is made to react with the reaction liquid 105, and metal is generated. Trace amount of the organic matter is measured with high sensitivity, by a method wherein material quantity of the organic matter adsorbed on the surface of the semiconductor substrate 103 is obtained, by measuring material quantity of the metal.