FLUORESCENT X-RAY APPARATUS FOR MEASURING FILM THICKNESS OF MINUTE PART

FLUORESCENT X-RAY APPARATUS FOR MEASURING FILM THICKNESS OF MINUTE PART

PURPOSE:To provide a fluorescent X-ray measuring device for measuring the film thickness of a minute part which casts X-ray beams of a small diameter and has a large casting intensity, by providing a sample observing mechanism equipped with a function to observe a sample at all times and capable of...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: NAITO MITSUO
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator NAITO MITSUO
description PURPOSE:To provide a fluorescent X-ray measuring device for measuring the film thickness of a minute part which casts X-ray beams of a small diameter and has a large casting intensity, by providing a sample observing mechanism equipped with a function to observe a sample at all times and capable of shortening the distance between a collimator and the sample. CONSTITUTION:A mirror for registering a sample is arranged so that the sample can be observed while a shutter is closed. Moreover, the mirror is coupled with the shutter at a position upper than a collimator 6. A mirror 9b for observing the sample being measured is disposed in a manner to observe the sample while the shutter is opened. The mirror 9b is coupled to the shutter at a position upper than the collimator 6. Therefore, it is possible to switch the mirror for observing the sample in association with the opening/closing operation of the shutter. In this manner, the sample can be always observed irrespective of the state of the shutter whether it is opened or closed, and the distance between the collimator and the sample can be reduced. Accordingly, a fluorescent X-ray apparatus for measuring the film thickness of a minute part which invites less extension of the diameter of beams and has a large intensity to cast X rays is provided.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JPH06273147A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JPH06273147A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JPH06273147A3</originalsourceid><addsrcrecordid>eNrjZHB38wn1D3INdnb1C1GI0A1yjFRwDAhwDHIMCQ1WcPMPUvB1dQwODfL0c1dw8_TxVQjx8HT29nMNDlbwd1Pw9fQLDXFVACoP4WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8V4BHgZmRubGhibmjsbEqAEA-7Qs_A</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>FLUORESCENT X-RAY APPARATUS FOR MEASURING FILM THICKNESS OF MINUTE PART</title><source>esp@cenet</source><creator>NAITO MITSUO</creator><creatorcontrib>NAITO MITSUO</creatorcontrib><description>PURPOSE:To provide a fluorescent X-ray measuring device for measuring the film thickness of a minute part which casts X-ray beams of a small diameter and has a large casting intensity, by providing a sample observing mechanism equipped with a function to observe a sample at all times and capable of shortening the distance between a collimator and the sample. CONSTITUTION:A mirror for registering a sample is arranged so that the sample can be observed while a shutter is closed. Moreover, the mirror is coupled with the shutter at a position upper than a collimator 6. A mirror 9b for observing the sample being measured is disposed in a manner to observe the sample while the shutter is opened. The mirror 9b is coupled to the shutter at a position upper than the collimator 6. Therefore, it is possible to switch the mirror for observing the sample in association with the opening/closing operation of the shutter. In this manner, the sample can be always observed irrespective of the state of the shutter whether it is opened or closed, and the distance between the collimator and the sample can be reduced. Accordingly, a fluorescent X-ray apparatus for measuring the film thickness of a minute part which invites less extension of the diameter of beams and has a large intensity to cast X rays is provided.</description><edition>5</edition><language>eng</language><subject>MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PHYSICS ; TESTING</subject><creationdate>1994</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19940930&amp;DB=EPODOC&amp;CC=JP&amp;NR=H06273147A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25562,76317</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19940930&amp;DB=EPODOC&amp;CC=JP&amp;NR=H06273147A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NAITO MITSUO</creatorcontrib><title>FLUORESCENT X-RAY APPARATUS FOR MEASURING FILM THICKNESS OF MINUTE PART</title><description>PURPOSE:To provide a fluorescent X-ray measuring device for measuring the film thickness of a minute part which casts X-ray beams of a small diameter and has a large casting intensity, by providing a sample observing mechanism equipped with a function to observe a sample at all times and capable of shortening the distance between a collimator and the sample. CONSTITUTION:A mirror for registering a sample is arranged so that the sample can be observed while a shutter is closed. Moreover, the mirror is coupled with the shutter at a position upper than a collimator 6. A mirror 9b for observing the sample being measured is disposed in a manner to observe the sample while the shutter is opened. The mirror 9b is coupled to the shutter at a position upper than the collimator 6. Therefore, it is possible to switch the mirror for observing the sample in association with the opening/closing operation of the shutter. In this manner, the sample can be always observed irrespective of the state of the shutter whether it is opened or closed, and the distance between the collimator and the sample can be reduced. Accordingly, a fluorescent X-ray apparatus for measuring the film thickness of a minute part which invites less extension of the diameter of beams and has a large intensity to cast X rays is provided.</description><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1994</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHB38wn1D3INdnb1C1GI0A1yjFRwDAhwDHIMCQ1WcPMPUvB1dQwODfL0c1dw8_TxVQjx8HT29nMNDlbwd1Pw9fQLDXFVACoP4WFgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8V4BHgZmRubGhibmjsbEqAEA-7Qs_A</recordid><startdate>19940930</startdate><enddate>19940930</enddate><creator>NAITO MITSUO</creator><scope>EVB</scope></search><sort><creationdate>19940930</creationdate><title>FLUORESCENT X-RAY APPARATUS FOR MEASURING FILM THICKNESS OF MINUTE PART</title><author>NAITO MITSUO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JPH06273147A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1994</creationdate><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>NAITO MITSUO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NAITO MITSUO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>FLUORESCENT X-RAY APPARATUS FOR MEASURING FILM THICKNESS OF MINUTE PART</title><date>1994-09-30</date><risdate>1994</risdate><abstract>PURPOSE:To provide a fluorescent X-ray measuring device for measuring the film thickness of a minute part which casts X-ray beams of a small diameter and has a large casting intensity, by providing a sample observing mechanism equipped with a function to observe a sample at all times and capable of shortening the distance between a collimator and the sample. CONSTITUTION:A mirror for registering a sample is arranged so that the sample can be observed while a shutter is closed. Moreover, the mirror is coupled with the shutter at a position upper than a collimator 6. A mirror 9b for observing the sample being measured is disposed in a manner to observe the sample while the shutter is opened. The mirror 9b is coupled to the shutter at a position upper than the collimator 6. Therefore, it is possible to switch the mirror for observing the sample in association with the opening/closing operation of the shutter. In this manner, the sample can be always observed irrespective of the state of the shutter whether it is opened or closed, and the distance between the collimator and the sample can be reduced. Accordingly, a fluorescent X-ray apparatus for measuring the film thickness of a minute part which invites less extension of the diameter of beams and has a large intensity to cast X rays is provided.</abstract><edition>5</edition><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_JPH06273147A
source esp@cenet
subjects MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
title FLUORESCENT X-RAY APPARATUS FOR MEASURING FILM THICKNESS OF MINUTE PART
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-09T18%3A54%3A32IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=NAITO%20MITSUO&rft.date=1994-09-30&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJPH06273147A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true