SURFACE CONTAMINATION INSPECTING APPARATUS

PURPOSE:To enhance smear inspection speed by employing a plurality of smear arms for smearing a wide area simultaneously and transferring a specimen such that the waiting time for smear table is shortened. CONSTITUTION:A plurality of specimens 2 are transferred sequentially on a transfer conveyor 1 onto a smear table 11. A smear control section 12 controls the smear table 11 and a plurality of smear arms 5 to rotate the specimen 2 and the arms 5 relatively thus smearing the specimen 2 by means of a filter paper 5a at the tip of the arm. A transfer control section 13 controls the conveyor 1 so that a smeared specimen 2 is transferred onto a measurement waiting table 14 and a next specimen 2 is transferred onto the smear table 11. On the other hand, a measurement control section 15 removes the filter paper 5a from each smear arm 5 and measures radiation dose while a contamination detector 7 checks contamination on the surface of the specimen 2. A transfer conveyor 8 is then controlled to transfer the specimen 2 from the waiting table 14 to other place depending on the check result.