PARTIAL VACUUM ELECTRON BEAM WELDING EQUIPMENT AND METHOD THEREOF

PURPOSE:To improve working efficiency of carrying-in and carrying-out of materials to be welded by setting multidimensionally the electron beam irradiation position of an electron gun provided on the vacuum vessel inside and providing differential exhaust chambers on a carrying-in port and a carrying-out port. CONSTITUTION:The materials 1 to be welded enter the vacuum vessel 2 inside through a vacuum seal part 7 and a differential exhaust chamber 3 via a line arranging device 8. In the vacuum vessel 2, the electron gun 10 irradiates a welding groove of the materials 1 to be welded with an electron beam and heat input required for partial melting of the welding groove part is carried out to perform welding. The electron gun 10 is subjected to positional control multidimensionally by an electron gun traveling device 9. The periphery of a weld zone is cooled by using a cooling plate 11 as nccessary on the materials 1 to be welded after welding. The materials 1 to be welded after welding enters the line arranging device 8 through the carrying-out side differential exhaust chamber 3 and the vacuum seal parts 7 and after the deformation thereof is corrected, these materials are wound around a drum by a winding device 6.