EXHAUST VACUUM PUMP FOR VACUUM MANUFACTURING DEVICE
PURPOSE:To provide an exhaust vacuum pump for vacuum manufacturing device which can predict the adhesion and blocking of a reaction product to an exhaust system. CONSTITUTION:This exhaust vacuum pump 2 for vacuum manufacturing device 1 is provided with an ammeter 5 for measuring the operating curren...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To provide an exhaust vacuum pump for vacuum manufacturing device which can predict the adhesion and blocking of a reaction product to an exhaust system. CONSTITUTION:This exhaust vacuum pump 2 for vacuum manufacturing device 1 is provided with an ammeter 5 for measuring the operating current of a motor 3 and thermometer 4 for measuring temperature in the exhaust pipe of the pump to provide a diagnostic device 6 which detects the blocking of an exhaust system by utilizing the output of the ammeter 5 and/or the thermometer 4. |
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