POSITIVE TYPE RESIST COMPOSITION FOR BLACK MATRIX

PURPOSE:To obtain a resist compsn. excellent, in various properties such as fineness and heat resistance and giving a sufficiently high black density by incorporating an alkali-soluble resin, a quinonediazido compd., a black pigment and a solvent. CONSTITUTION:This positive type resist compsn. conta...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAMOTO SHIGEKI, HISHIRO YOSHIKI, TAKEYAMA NAOMIKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTROGRAPHY FREQUENCY-CHANGING HOLOGRAPHY MATERIALS THEREFOR NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PURPOSE:To obtain a resist compsn. excellent, in various properties such as fineness and heat resistance and giving a sufficiently high black density by incorporating an alkali-soluble resin, a quinonediazido compd., a black pigment and a solvent. CONSTITUTION:This positive type resist compsn. contains an alkali-soluble resin, a quinonediazide compd., a black pigment and a solvent. The alkali-soluble resin is, e.g. novolak resin or a vinyl copolymer. The novolak resin is, e.g. novolak resin having about 1,000-50,000mol.wt. and contg. repeating units represented by the formula, wherein each of R1-R5 is H, a halogen, alkyl, alkenyl or acetyl and each of R6 and R7 is alkyl, benzyl or phenyl. The vinyl polymer is, e.g. polyvinyl phenol, hydrogenated polyvinyl phenol or a vinyl phenol copolymer.