REFERENCE SPECIMEN OF TOTAL REFLECTION FLUORESCENT X-RAY ANALYSIS AND SURFACE ANALYZING METHOD OF USING IT

PURPOSE:To obtain a reference specimen of a total reflection fluorescent X-ray capable of measuring quantity of a metallic element with good accuracy, reliability and reproducibility by forming a carrier from a Langmuir-Brodget(LB) film or non-metallic small particles. CONSTITUTION:The constitution of a LB film is controlled in a molecular level to be uniformly formed on a substrate. A proper metallic salt is beforehand involved in a liquid phase at a prescribed concentration and metallic ion is immersed into a film structure in accordance with the concentration. As a result, the LB film having metallic ion with the predetermined concentration is formed on the substrate so that a plate type reference specimen superior in reliability and reproducibility is obtained. On the other hand, non-metallic small particles which contains metallic atoms in a predetermined concentration or stably holds them on the surface thereof, are stuck to the substrate so that a residual dregs-type reference specimen superior in reliability and reproducibility is obtained. For example of both of them, an arachic acid barium LB film and a ferrite coated resin particles are used and intensities of BaLalpha ray and a FeKalpha ray are monitored respectively. Thereby, quantity of a metallic element is easily and accurately measured.