PIEZOELECTRIC TYPE VIBRATION SENSOR

PURPOSE:To improve detecting accuracy in the (z) axis direction. CONSTITUTION:A structure is provided by laminating a film shape piezoelectric body 26 and a load body 25 on a base 21. The piezoelectric body 26, the first electrode 29 arranged over the whole one surface of the piezoelectric body 26 and the second electrode 31 arranged on the other surface of the piezoelectric body 26 so as to detect an electric potential difference to the first electrode 29, are provided. The second electrode 31 is arranged in a pair on the (x) axis, and is composed of a pair of (x) axis use divided electrodes 33 arranged mutually in point symmetry, a pair of (y) axis use divided electrodes 34 which are formed in the same area with the (x) axis use divided electrodes and are arranged mutually in point symmetry on the (y) axis and a (z) axis use electrode whose center is situated in the center of the piezoelectric body 26. An area of the (z) axis use electrode is formed in an area of 1-10 times one of the respective divided electrodes 33 and 34. Thereby, crosstalk can be restrained in a low value, and detecting accuracy in the (z) axis direction can be improved.