JOULE-THOMSON TYPE COOLER
PURPOSE:To reduce breathing of a cooling temperature and to eliminate a fear of clogging of an injection port of a nozzle by uniformly cooling an element to be cooled in the case of improving a Joule-Thomson type cooler in which a semiconductor device, etc., is maintained at a predetermined low temp...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To reduce breathing of a cooling temperature and to eliminate a fear of clogging of an injection port of a nozzle by uniformly cooling an element to be cooled in the case of improving a Joule-Thomson type cooler in which a semiconductor device, etc., is maintained at a predetermined low temperature. CONSTITUTION:The Joule-Thomson type cooler has a sheath 11 made of a heat insulator, a bottomed inner cylindrical cylinder 10 provided in the sheath 11, a nozzle 15 provided in an opening of the cylinder 10 to inject high pressure liquefied gas G, a needle valve 20 for switching the port of the nozzle 15, and a temperature sensor contained therein, wherein an opening end face of the sheath 11 is brought into close contact with a rear surface of an element to be cooled to cool the element to be cooled to a predetermined low temperature, and comprises a buffer 30 engaged with the opening of the sheath 11 to burner an injection flow of the gas G. |
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