SEMICONDUCTOR-WAFER DUSTFREE CONVEYANCE APPARATUS

PURPOSE:To provide a semiconductor-wafer dustfree conveyance apparatus wherein, even when the cleanliness degree of a clean room as a whole is not high, it prevents a semiconductor wafer from being contamined when the wafer is conveyed and its operating time is short. CONSTITUTION:The title apparatu...

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Bibliographische Detailangaben
1. Verfasser:	TAKEMURA MASATO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a semiconductor-wafer dustfree conveyance apparatus wherein, even when the cleanliness degree of a clean room as a whole is not high, it prevents a semiconductor wafer from being contamined when the wafer is conveyed and its operating time is short. CONSTITUTION:The title apparatus is provided with a fan 2 which is provided with a dust filter 1 and which generates a descending air current, with a carrier 5 in which a hole passing the descending air current is formed in the bottom and which houses semiconductor wafers 6 while they are being exposed to the descending air current and with a dustproof wall which surrounds the descending air current.