OPTICAL DEVICE AND MANUFACTURE THEREOF

PURPOSE: To manufacture a reliable optical device by making the array of various kind of components in optical elements advantageous. CONSTITUTION: A block of single-crystal silicon 1 which is so directed as to have a main body light 2 arrayed linearly in a (110) crystal plane is selectively etched...

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Bibliographische Detailangaben
Hauptverfasser:	ARAN JIEIMUSU YAKOBUSUUKUTSUKU, MAAKU EDOWAADO KURISUTOFUAA BOUEN, PEETAA EDOWAADO MAIKERU FUREERE
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE: To manufacture a reliable optical device by making the array of various kind of components in optical elements advantageous. CONSTITUTION: A block of single-crystal silicon 1 which is so directed as to have a main body light 2 arrayed linearly in a (110) crystal plane is selectively etched partitioning a groove 4 for receiving an optical waveguide 8 and a reflecting surface 7 which faces the groove 4. The groove 4 is in the crystal plane. Thus, the groove is parallel to the surface 2 of the main body and the reflecting surface 7 is at 45 deg. to the main body surface.