METHOD AND DEVICE FOR CONTROLLING CARRIER CASSETTE

PURPOSE:To automatically control a carrier cassette classified by its use for a deteriorating condition of the carrier cassette relating to a degree of cleanli ness, deformation of shape and static electricity by discriminating a carrier cassette discrimination code. CONSTITUTION:A device comprises a host computer 50 for controlling a total unit, wafer carrier cassette use history (number of access times) decision unit 25 for deciding a history of using a wafer carrier cassette, carrier cassette cleaner 26 for cleaning the wafer carrier cassette and a wafer carrier cassette automatic stocker 58 in a diffusion/implant/anneal processing shop. A semiconductor wafer processor 22, wafer carrier cassette use history decision unit 25 and the carrier cassette cleaner 26 are information controlled and action controlled per wafer carrier cassette discrimination code unit by the host computer 50. In this way, a condition of deteriorating the carrier cassette can be automatically controlled, classified by its use.