CENTRIFUGAL SUBSTRATE DRYER
PURPOSE:To prevent rattling of a movable substrate holding member not locked in directly closed state during rotation of the rotor. CONSTITUTION:One movable substrate holding member 24 having an engaging pin 24 is engaged with the other movable substrate holding member 23 having an engaging part upo...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE:To prevent rattling of a movable substrate holding member not locked in directly closed state during rotation of the rotor. CONSTITUTION:One movable substrate holding member 24 having an engaging pin 24 is engaged with the other movable substrate holding member 23 having an engaging part upon closure thereof. Since two movable substrate holding members are engaged directly each other, load to be applied to a coupling rod 25 can be reduced during rotation of the rotor 5. |
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