CENTRIFUGAL SUBSTRATE DRYER

PURPOSE:To provide a centrifugal substrate dryer for cutting liquid from a substrate and drying by rotating the substrate while holding in which a lock member for sustaining closed state of a movable substrate holding member is prevented from removal during rotation of the rotor. CONSTITUTION:A roto...

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Hauptverfasser: ISHIHAMA HITOSHI, SATO KAZUTAKE, TAKEUCHI KAZUO, IIZUKA NAMIKO, NOGUCHI TAKAYUKI
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Sprache:eng
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creator ISHIHAMA HITOSHI
SATO KAZUTAKE
TAKEUCHI KAZUO
IIZUKA NAMIKO
NOGUCHI TAKAYUKI
description PURPOSE:To provide a centrifugal substrate dryer for cutting liquid from a substrate and drying by rotating the substrate while holding in which a lock member for sustaining closed state of a movable substrate holding member is prevented from removal during rotation of the rotor. CONSTITUTION:A rotor 5 is provided rotatably with an oscillating rod 36 coupled through a tension bar 38 with a movable substrate holding member 23 and through a coupling rod 39 with a lock member 33. Since vibration of the tension bar is not transmitted directly to the lock member during rotation of the rotor, the lock member is prevented from removal.
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subjects BASIC ELECTRIC ELEMENTS
BLASTING
DRYING
DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
SEMICONDUCTOR DEVICES
WEAPONS
title CENTRIFUGAL SUBSTRATE DRYER
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