CENTRIFUGAL SUBSTRATE DRYER

PURPOSE:To provide a centrifugal substrate dryer for cutting liquid from a substrate and drying by rotating the substrate while holding in which a lock member for sustaining closed state of a movable substrate holding member is prevented from removal during rotation of the rotor. CONSTITUTION:A roto...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ISHIHAMA HITOSHI, SATO KAZUTAKE, TAKEUCHI KAZUO, IIZUKA NAMIKO, NOGUCHI TAKAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES WEAPONS
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Beschreibung
Zusammenfassung:	PURPOSE:To provide a centrifugal substrate dryer for cutting liquid from a substrate and drying by rotating the substrate while holding in which a lock member for sustaining closed state of a movable substrate holding member is prevented from removal during rotation of the rotor. CONSTITUTION:A rotor 5 is provided rotatably with an oscillating rod 36 coupled through a tension bar 38 with a movable substrate holding member 23 and through a coupling rod 39 with a lock member 33. Since vibration of the tension bar is not transmitted directly to the lock member during rotation of the rotor, the lock member is prevented from removal.