SOLID ORGANIC METAL COMPOUND SUPPLY EQUIPMENT IN ORGANIC METAL VAPOR GROWTH METHOD

SOLID ORGANIC METAL COMPOUND SUPPLY EQUIPMENT IN ORGANIC METAL VAPOR GROWTH METHOD

PURPOSE:To stabilize the supply speed of solid organic metal, by using a column type vessel when a filling vessel is uniformly filled with solid organic metal compound, its carrier and filler. CONSTITUTION:A column type vessel 1 made of glass whose inner diameter and height are 30mm and 200mm, respe...

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Bibliographische Detailangaben
1. Verfasser: TOKUTOME KOICHI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:PURPOSE:To stabilize the supply speed of solid organic metal, by using a column type vessel when a filling vessel is uniformly filled with solid organic metal compound, its carrier and filler. CONSTITUTION:A column type vessel 1 made of glass whose inner diameter and height are 30mm and 200mm, respectively, is filled with mixture of 50g trymethyl indium and 50g stainless 'helipack'. The vessel 1 is dipped in a thermostatic chamber at 25 deg.C. A carrier gas feeding outlet 4 is connected with a liquid nitrogen trap for TMI capturing use. Piping which connects the feeding outlet 4 with the liquid nitrogen trap is heated at 35 deg.C, in order to prevent TMI from depositing in the piping. The supply speed of TMI is stable until the application percentage is 70wt.%. Thereby solid organic metal compound can be supplied to a vapor growth equipment with excellent reproducibility.