POSITIVE TYPE PHOTOSENSITIVE COMPOSITION
PURPOSE:To provide a positive type photosensitive compsn. having high photosensitivity and usable under light within a wide wavelength range. CONSTITUTION:This positive type photosensitive compsn. contains a compd. (a) having at least two enol ether groups represented by the formula, a linear polyme...
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Zusammenfassung: | PURPOSE:To provide a positive type photosensitive compsn. having high photosensitivity and usable under light within a wide wavelength range. CONSTITUTION:This positive type photosensitive compsn. contains a compd. (a) having at least two enol ether groups represented by the formula, a linear polymer (b) having an acid component and hydroxyl groups and a compd. (c) which is decomposed and generates an acid when irradiated with active light or radiation and the components (a) (b) are crosslinked with heat. In the formula each of R1-R3 is H, alkyl or aryl and two of them may bond to each other to form a satd. or olefinic unsatd. ring. |
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